YS - 100 Vacuum Plasma Cleaner
【Instrument Features】
Mobile Phone Industry: Surface cleaning and activation of TP (Touch Panel), middle frame, and back cover.
PCB/FPC Industry: Removal of hole drilling contamination and surface cleaning; surface roughening and cleaning of Coverlay.
Semiconductor Industry: Pretreatment for semiconductor packaging, camera modules, LED packaging, BGA packaging, and Wire Bonding.
Ceramics: Pretreatment before packaging and dispensing.
Surface Roughening and Etching: PI surface roughening, PPS etching, removal of PN junctions on semiconductor silicon wafers, and ITO film etching.
Plastic Materials: Surface activation of Teflon, ABS, and other plastic materials; cleaning and activation of plastic substrates.
Surface cleaning before ITO coating.
Flexible product placement fixtures, adaptable to irregularly shaped products.
Horizontal electrode design, meeting the processing needs of flexible products.
Low energy and gas consumption.
Convenient board loading and unloading methods.
Integrated vacuum system with a small footprint.
Reasonable plasma reaction space for uniform treatment.
Integrated control system design for easy operation.
【Technical Parameters】
Power Supply System | Radio Frequency (RF) Power Supply | Medium-Frequency (MF) Power Supply | ||
Power | 0~600 W | 0~2000W | ||
Frequency | 13.56 KHz | 40KHz | ||
Two-Stage Rotary Vane Pump (Oil Pump) | 60 cubic meters per hour | |||
Vacuum System | Vacuum Pipeline | Full stainless steel pipelines and high-strength vacuum bellows | ||
Material | Aluminum alloy (stainless steel cavity customizable) | |||
Thickness | 25 millimeters | |||
Sealing Performance | Military-grade welding sealing | |||
Internal Dimensions of the Cavity | 450X450X500mm (Width x Height x Depth) | |||
Effective Dimensions of the Electrode Plate | 420X411mm (Width x Depth) | |||
Available Space Spacing | 22.5 millimeters | |||
Arrangement Mode of Electrode Plates | Horizontal arrangement, removable | |||
Working Tray | One set as standard, material optional (aluminum, steel wire mesh) | |||
Working Space | 8 layers | |||
Gas System | Flow Rate Range | 0~300 Standard Cubic Centimeters per Minute | ||
Process Gas Circuit | Two channels as standard, customizable | |||
Control System | System Control | Programmable Logic Controller | ||
Delivery Method | 7-inch touch screen | |||
Other Parameters | Overall Dimensions | 900X1750X1000mm (Width x Height x Depth) | ||
Weight | 200 Kilograms | |||
Equipment Exterior Color | Silver gray | |||
Facility Specification Requirements | ||||
AC Power Supply Specifications | Power Supply: AC 380V, 50/60Hz, 5 wires, 50A | |||
Facility Exhaust | Flow Rate: 2.0 m³/min | |||
Facility Process Gas Requirements | Flow Rate: 1~10 L/min | |||
Pressure: 3~7 kg/cm | ||||
Pipe Diameter: 6X4 mm | ||||
Material: PU (Polyurethane) | ||||
Pipe Purity: Above 99.99% | ||||
Facility Compressed Air Requirements | Flow Rate: 1~10 L/min | |||
Pressure: 3~7 kg/cm | ||||
Pipe Diameter: 8X5 mm | ||||
Material: PU (Polyurethane) | ||||
Pipe Dew Point: Below -40℃ | ||||
Particles (>0.3 μm): 10 Pcs/ft³ | ||||
General Specifications
General Specifications | |
Hazard Symbols | High Voltage Hazard Symbol |
Operating Environment | Temperature: 15~30℃ |
Other Precautions | No flammable gases, corrosive gases, explosive or reactive dust allowed. |
Configuration List
Serial No. | Name | Description & Specification | Unit of Measurement | Quantity | |
1 | Main Unit | Overall Dimensions: 900×1750×1000 mm (W × H × D) | unit | 1 | |
2 | Vacuum Chamber | Aluminum Alloy Vacuum Chamber | piece | 1 | |
Internal Dimensions: 450×450×500 mm (W × H × D) | |||||
3 | Excitation Power Supply | Radio Frequency (RF) | Medium Frequency (MF) Power Supply | set | 1 |
Frequency：13.56MHz； | Frequency：40KHz； | ||||
0~600W | 0~1000W; | ||||
or 0~1000W Optional； | |||||
Automatic Vacuum Capacitor Matching Network | |||||
4 | PLC | Siemens AG，S7-200 | piece | 1 | |
5 | Touch Screen | WEINVIEW，7-inch screen，MT6071iE | piece | 1 | |
6 | Flow Meter | wawick | piece | 2 | |
7 | Vacuum Pump Set | VALUE Dual - Stage Rotary Vane Vacuum Pump (Oil - Sealed)：60m3/h | unit | 1 | |
8 | Vacuum Gauge | INFICON | piece | 1 | |
9 | Instruction Manual | Operation Manual for Vacuum Plasma Cleaner Model WBE-100 | copy | 1 | |
Maintenance | |||
Maintenance | |||
Project | Inspection Content | Lifespan | Inspection Frequency |
Oil Pump | Filter Element | 2000 hours of service life | 15 days |
oil pumping | 2000 hours of service life | 15 days | |
